Method for microfabricating structures using silicon-on-insulator material

Details for Australian Patent Application No. 2009248425 (hide)

Owner The Charles Stark Draper Laboratory, Inc.

Inventors Sawyer, William D.; Borenstein, Jeffrey T.

Agent Davies Collison Cave

Pub. Number AU-A-2009248425

Parent 2003272215

Filing date 10 December 2009

Wipo publication date 7 January 2010

International Classifications

B81C 3/00 (2006.01) Assembling of devices or systems from individually processed components

H01L 21/46 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 December 2009 Complete Application Filed

7 January 2010 Application Open to Public Inspection

  Published as AU-A-2009248425

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