Method for producing metal oxide layers having a pre-defined structure by way of arc evaporation

Details for Australian Patent Application No. 2009240321 (hide)

Owner Oerlikon Trading AG, Trubbach

Inventors Ramm, Jurgen

Agent Spruson & Ferguson

Pub. Number AU-A-2009240321

PCT Pub. Number WO2009/129880

Priority 61/047,591 24.04.08 US; 08016572.3 19.09.08 EP

Filing date 6 February 2009

Wipo publication date 29 October 2009

International Classifications

C23C 14/32 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by explosion

C23C 14/08 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

Event Publications

16 December 2010 PCT application entered the National Phase

  PCT publication WO2009/129880 Priority application(s): WO2009/129880

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