Method for manufacturing workpieces with ion-etched surface

Details for Australian Patent Application No. 2009240083 (hide)

Owner Oerlikon Trading AG, Truebbach

Inventors Krassnitzer, Siegfried; Esselbach, Markus; Gstoehl, Oliver

Agent Griffith Hack

Pub. Number AU-A-2009240083

PCT Pub. Number WO2009/130148

Priority 61/046,877 22.04.08 US

Filing date 15 April 2009

Wipo publication date 29 October 2009

International Classifications

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 November 2010 PCT application entered the National Phase

  PCT publication WO2009/130148 Priority application(s): WO2009/130148

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