Wafer imaging and processing method and apparatus

Details for Australian Patent Application No. 2009230877 (hide)

Owner BT Imaging Pty Ltd

Inventors Trupke, Thorsten; Bardos, Robert A.

Agent Shelston IP

Pub. Number AU-A-2009230877

PCT Pub. Number WO2009/121133

Priority 2008901552 31.03.08 AU

Filing date 31 March 2009

Wipo publication date 8 October 2009

International Classifications

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

G01N 21/66 (2006.01) Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

Event Publications

21 October 2010 PCT application entered the National Phase

  PCT publication WO2009/121133 Priority application(s): WO2009/121133

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