Specimen holder assembly

Details for Australian Patent Application No. 2009227755 (hide)

Owner University of Sheffield

Inventors Xu, Xiaojing; Gay, Ralph; Inkson, Beverley; Moebus, Guenter; Wei, Guan; Lockwood, Aiden James; Wang, Jing Jing

Agent Halfords IP

Pub. Number AU-A-2009227755

PCT Pub. Number WO2009/115838

Priority 08102641.1 15.03.08 EP; 0804771.4 17.03.08 GB

Filing date 16 March 2009

Wipo publication date 24 September 2009

International Classifications

H01J 37/20 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Means for supporting or positioning the object or the material

H01J 37/26 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Electron or ion microscopes

H01L 41/09 (2006.01) Piezo-electric elements in general -

Event Publications

30 September 2010 PCT application entered the National Phase

  PCT publication WO2009/115838 Priority application(s): WO2009/115838

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