Method for depositing a film onto a substrate

Details for Australian Patent Application No. 2009224841 (hide)

Owner Lam Research AG

Inventors Topa, Dan; Stadler, Andreas; Schimper, Hermann-Josef; Brendel, Uwe; Basch, Angelika; Dittrich, Herbert

Agent Cullens

Pub. Number AU-A-2009224841

PCT Pub. Number WO2009/112388

Priority A 416/2008 14.03.08 AT

Filing date 2 March 2009

Wipo publication date 17 September 2009

International Classifications

C23C 14/06 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the coating material

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

Event Publications

14 October 2010 PCT application entered the National Phase

  PCT publication WO2009/112388 Priority application(s): WO2009/112388

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