Method for patterned etching of selected material

Details for Australian Patent Application No. 2009208384 (hide)

Owner NewSouth Innovations Pty Limited

Inventors Lennon, Alison Joan; Ho-Baillie, Anita Wing Yi; Wenham, Stuart Ross

Agent FB Rice

Pub. Number AU-A-2009208384

PCT Pub. Number WO2009/094711

Priority 2008900477 01.02.08 AU; 2008906040 21.11.08 AU; 2008903289 27.06.08 AU

Filing date 29 January 2009

Wipo publication date 6 August 2009

International Classifications

H01L 21/311 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

26 August 2010 PCT application entered the National Phase

  PCT publication WO2009/094711 Priority application(s): WO2009/094711

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