A system and process for processing the substrate in the chamber

Details for Australian Patent Application No. 2009203106 (hide)

Owner Dongguan Anwell Digital Machinery Co., Ltd.

Inventors Fan, Chunwah

Agent FB Rice

Pub. Number AU-B-2009203106

PCT Pub. Number WO2009/082985

Priority 11/968,188 01.01.08 US; 12/118,685 10.05.08 US

Filing date 4 January 2009

Wipo publication date 9 July 2009

Acceptance publication date 12 January 2012

International Classifications

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B05C 11/00 (2006.01) Component parts, details or accessories not specifically provided for in groups

C23C 16/00 (2006.01) Chemical deposition or plating by decomposition

Event Publications

22 July 2010 PCT application entered the National Phase

  PCT publication WO2009/082985 Priority application(s): WO2009/082985

12 January 2012 Application Accepted

  Published as AU-B-2009203106

10 May 2012 Standard Patent Sealed

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