Chemical Vapor Deposition Reactor and Method

Details for Australian Patent Application No. 2009202611 (hide)

Owner Li, G.

Inventors Li, Gang

Agent Molins & Co

Pub. Number AU-B-2009202611

Priority 2008903914 31.07.08 AU

Filing date 30 June 2009

Wipo publication date 18 February 2010

Acceptance publication date 19 January 2012

International Classifications

C23C 16/455 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

B01J 3/00 (2006.01) Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter

Event Publications

9 July 2009 Complete Application Filed

  Priority application(s): 2008903914 31.07.08 AU

18 February 2010 Application Open to Public Inspection

  Published as AU-B-2009202611

19 January 2012 Application Accepted

  Published as AU-B-2009202611

17 May 2012 Standard Patent Sealed

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