Spiral phase optical aberration measurements

Details for Australian Patent Application No. 2009202140 (hide)

Owner Canon Kabushiki Kaisha

Inventors Ashman, Ross

Agent Spruson & Ferguson

Pub. Number AU-A-2009202140

Filing date 29 May 2009

Wipo publication date 16 December 2010

International Classifications

G01J 3/45 (2006.01) Spectrometry - Interferometric spectrometry

Event Publications

18 June 2009 Complete Application Filed

16 December 2010 Application Open to Public Inspection

  Published as AU-A-2009202140

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