Methods and apparatus for manufacturing semiconductor wafers

Details for Australian Patent Application No. 2009200196 (hide)

Owner General Electric Company

Inventors Jonczyk, Ralf; Rand, James

Agent Davies Collison Cave

Pub. Number AU-A-2009200196

Priority 12/026,586 06.02.08 US

Filing date 20 January 2009

Wipo publication date 20 August 2009

International Classifications

H01L 21/02 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

5 February 2009 Complete Application Filed

  Priority application(s): 12/026,586 06.02.08 US

20 August 2009 Application Open to Public Inspection

  Published as AU-A-2009200196

29 April 2010 Assignment before Grant

  General Electric Company The application has been assigned to Motech Americas, LLC

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