Large area nanopatterning method and apparatus

Details for Australian Patent Application No. 2008348353 (hide)

Owner ROLITH, INC.

Inventors Volf, Boris; Landau, Igor; Kobrin, Boris

Agent Griffith Hack

Pub. Number AU-A-2008348353

PCT Pub. Number WO2009/094009

Priority 61/011,861 22.01.08 US

Filing date 18 November 2008

Wipo publication date 30 July 2009

International Classifications

H01L 21/027 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 July 2010 PCT application entered the National Phase

  PCT publication WO2009/094009 Priority application(s): WO2009/094009

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