Owner JX Nippon Mining & Metals Corporation

Inventors Shindo, Yuichiro; Kanou, Gaku; Takahata, Masahiro

Agent Pizzeys

Pub. Number AU-B-2008344685

PCT Pub. Number WO2009/084318

Priority 2007-338423 28.12.07 JP

Filing date 31 October 2008

Wipo publication date 9 July 2009

Acceptance publication date 27 September 2012

C22B 9/22 General processes of refining or remelting of metals

C22B 59/00 Obtaining rare earth metals

C22C 28/00 Alloys based on a metal not provided for in groups

C23C 14/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01L 21/283 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 29/423 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 29/49 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 29/78 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier