Method and devices for controlling a vapour flow in vacuum evaporation

Details for Australian Patent Application No. 2008342644 (hide)

Owner Industrial Plasma Services & Technologies - IPST GmbH

Inventors Vanden Brande, Pierre

Agent Griffith Hack

Pub. Number AU-A-2008342644

PCT Pub. Number WO2009/083546

Priority 08150579.4 23.01.08 EP; 2007/0618 21.12.07 BE

Filing date 22 December 2008

Wipo publication date 9 July 2009

International Classifications

C23C 14/16 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - on metallic substrates or on substrates of boron or silicon

C23C 14/24 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C23C 14/32 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by explosion

C23C 14/54 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

12 August 2010 PCT application entered the National Phase

  PCT publication WO2009/083546 Priority application(s): WO2009/083546

5 July 2012 Assignment before Grant

  Industrial Plasma Services & Technologies - IPST GmbH The application has been assigned to Advanced Galvanisation AG

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