System and process for conveying workpieces into a chamber

Details for Australian Patent Application No. 2008342394 (hide)

Owner Dongguan Anwell Digital Machinery Co., Ltd.

Inventors Fan, Chunwah

Agent FB Rice

Pub. Number AU-B-2008342394

PCT Pub. Number WO2009/082983

Priority 11/968,188 01.01.08 US

Filing date 31 December 2008

Wipo publication date 9 July 2009

Acceptance publication date 12 January 2012

International Classifications

H01L 21/677 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/67 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof

H01L 21/673 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/687 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

22 July 2010 PCT application entered the National Phase

  PCT publication WO2009/082983 Priority application(s): WO2009/082983

12 January 2012 Application Accepted

  Published as AU-B-2008342394

10 May 2012 Standard Patent Sealed

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