Systems and methods for delivery of fluid-containing process material combinations

Details for Australian Patent Application No. 2008335308 (hide)

Owner Foresight Processing, LLC

Inventors Ware, Donald D.; Wrschka, Peter; Hughes, John E. Q.; Lurcott, Steven M.

Agent Wrays

Pub. Number AU-A-2008335308

PCT Pub. Number WO2009/076276

Priority 60/992,988 06.12.07 US

Filing date 8 December 2008

Wipo publication date 18 June 2009

International Classifications

H01L 21/304 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 June 2010 PCT application entered the National Phase

  PCT publication WO2009/076276 Priority application(s): WO2009/076276

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