Method of, and apparatus for, separating wafers from a wafer stack

Details for Australian Patent Application No. 2008334890 (hide)

Owner Gebr. Schmid GmbH & Co.

Inventors Huber, Reinhard

Agent Griffith Hack

Pub. Number AU-A-2008334890

PCT Pub. Number WO2009/074317

Priority 10 2007 061 410.3 11.12.07 DE

Filing date 11 December 2008

Wipo publication date 18 June 2009

International Classifications

B28D 5/00 (2006.01) Fine working of gems, jewels, crystals, e.g. of semiconductor material

B65G 59/04 (2006.01) De-stacking of articles

Event Publications

1 July 2010 PCT application entered the National Phase

  PCT publication WO2009/074317 Priority application(s): WO2009/074317

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