Production of free-standing solid state layers by thermal processing of substrates with a polymer

Details for Australian Patent Application No. 2008325223 (hide)

Owner President and Fellows of Harvard College

Inventors Lichtensteiger, Lukas; Pfeffer, Christian

Agent Davies Collison Cave

Pub. Number AU-A-2008325223

PCT Pub. Number WO2009/061353

Priority 0185107 30.11.07 CH; 0171207 02.11.07 CH

Filing date 24 October 2008

Wipo publication date 14 May 2009

International Classifications

H01L 21/762 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 June 2010 PCT application entered the National Phase

  PCT publication WO2009/061353 Priority application(s): WO2009/061353

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