Thermal evaporation sources for widearea deposition

Details for Australian Patent Application No. 2008310584 (hide)

Owner University of Delaware

Inventors Hanket, Gregory M.; Birkmire, Robert W.

Agent Griffith Hack

Pub. Number AU-A-2008310584

PCT Pub. Number WO2009/049285

Priority 60/998,640 12.10.07 US

Filing date 13 October 2008

Wipo publication date 16 April 2009

International Classifications

C23C 14/24 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

Event Publications

13 May 2010 PCT application entered the National Phase

  PCT publication WO2009/049285 Priority application(s): WO2009/049285

24 February 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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