Method and arrangement for providing chalcogens

Details for Australian Patent Application No. 2008297124 (hide)

Owner Centrotherm Photovoltaics AG

Inventors Hartung, Robert Michael; Schmid, Dieter; Lenz, Reinhard

Agent Wrays

Pub. Number AU-A-2008297124

PCT Pub. Number WO2009/034131

Priority 10 2007 048 204.5 08.10.07 DE; 10 2007 047 099.3 01.10.07 DE; 10 2007 043 051.7 11.09.07 DE; 10 2007 047 098.5 01.10.07 DE

Filing date 11 September 2008

Wipo publication date 19 March 2009

International Classifications

C23C 14/06 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the coating material

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

17 September 2009 PCT application entered the National Phase

  PCT publication WO2009/034131 Priority application(s): WO2009/034131

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