Plasma immersion ion processing for coating of hollow substrates

Details for Australian Patent Application No. 2008256944 (hide)

Owner Southwest Research Institute

Inventors Wei, Ronghua; Arps, James H.; Rincon, Christopher

Agent IP Gateway Patent and Trademark Attorneys

Pub. Number AU-A-2008256944

PCT Pub. Number WO2008/147804

Priority 11/752,787 23.05.07 US

Filing date 21 May 2008

Wipo publication date 4 December 2008

International Classifications

C23C 16/00 (2006.01) Chemical deposition or plating by decomposition

C23F 1/00 (2006.01) Etching metallic material by chemical means

Event Publications

15 January 2009 PCT application entered the National Phase

  PCT publication WO2008/147804 Priority application(s): WO2008/147804

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