Dry etching method

Details for Australian Patent Application No. 2008252203 (hide)

Owner ULVAC, INC.

Inventors Satou, Masayuki; Morikawa, Yasuhiro; Hayashi, Toshio; Suu, Koukou

Agent Griffith Hack

Pub. Number AU-A-2008252203

PCT Pub. Number WO2008/143004

Priority 2007-127789 14.05.07 JP

Filing date 8 May 2008

Wipo publication date 27 November 2008

International Classifications

H01L 21/306 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/3065 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 41/18 (2006.01) Piezo-electric elements in general - for piezo-electric or electrostrictive elements

H01L 41/22 (2006.01) Piezo-electric elements in general - Processes or apparatus specially adapted for the manufacture or treatment of these elements or of parts thereof

H03H 3/02 (2006.01) Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators

Event Publications

26 November 2009 PCT application entered the National Phase

  PCT publication WO2008/143004 Priority application(s): WO2008/143004

7 January 2010 Amendment Made

  The nature of the amendment is: Amend the name of the co-inventor from Satou, Masayuki to Satou, Tadayuki

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