Dry etching method

Details for Australian Patent Application No. 2008239010 (hide)

Owner Ulvac, Inc.

Inventors Suu, Koukou; Morikawa, Yasuhiro

Agent Pizzeys

Pub. Number AU-B-2008239010

PCT Pub. Number WO2008/126891

Priority 2007-103512 11.04.07 JP

Filing date 10 April 2008

Wipo publication date 23 October 2008

Acceptance publication date 15 September 2011

International Classifications

H01L 21/3065 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

5 November 2009 PCT application entered the National Phase

  PCT publication WO2008/126891 Priority application(s): WO2008/126891

15 September 2011 Application Accepted

  Published as AU-B-2008239010

19 January 2012 Standard Patent Sealed

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