Vacuum processing apparatus and film forming method using vacuum processing apparatus

Details for Australian Patent Application No. 2008218070 (hide)

Owner Mitsubishi Heavy Industries, Ltd.

Inventors Mashima, Hiroshi; Kawamura, Keisuke

Agent FB Rice

Pub. Number AU-A-2008218070

PCT Pub. Number WO2008/102738

Priority 2007-037852 19.02.07 JP

Filing date 18 February 2008

Wipo publication date 28 August 2008

International Classifications

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

26 February 2009 PCT application entered the National Phase

  PCT publication WO2008/102738 Priority application(s): WO2008/102738

5 March 2009 Amendment Made

  The nature of the amendment is: Amend the invention title to read Vacuum processing apparatus and deposition method using the vacuum processing apparatus 2009

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