A method for processing a semiconductor substrate surface and a chemical processing device for the semiconductor substrate surface

Details for Australian Patent Application No. 2007356732 (hide)

Owner WUXI SUNTECH POWER CO., LTD.

Inventors Ji, Jingjia; Shi, Zhengrong; Qin, Yusen

Agent Baldwins

Pub. Number AU-B-2007356732

PCT Pub. Number WO2009/009931

Priority 200710135836.2 16.07.07 CN

Filing date 23 August 2007

Wipo publication date 22 January 2009

Acceptance publication date 12 July 2012

International Classifications

H01L 21/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 February 2010 PCT application entered the National Phase

  PCT publication WO2009/009931 Priority application(s): WO2009/009931

12 July 2012 Application Accepted

  Published as AU-B-2007356732

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2007356750-System and method for managing parking rights

2007356691-3D embossing