Fabrication of microstructures and nanostructures using etching resist

Details for Australian Patent Application No. 2007350336 (hide)

Owner Northwestern University

Inventors Mirkin, Chad A.; Huang, Ling; Sanedrin, Raymond

Agent Davies Collison Cave

Pub. Number AU-A-2007350336

PCT Pub. Number WO2008/121137

Priority 60/886,839 26.01.07 US; 60/875,447 18.12.06 US

Filing date 17 December 2007

Wipo publication date 9 October 2008

International Classifications

G03F 7/00 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

B82B 3/00 (2006.01) Manufacture or treatment of nano-structures

Event Publications

2 July 2009 PCT application entered the National Phase

  PCT publication WO2008/121137 Priority application(s): WO2008/121137

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