Owner The Australian National University

Inventors Everett, Vernie Allan; Weber, Klaus Johannes; Blakers, Andrew William

Agent Spruson & Ferguson

Pub. Number AU-A-2007346895

PCT Pub. Number WO2008/098278

Filing date 15 February 2007

Wipo publication date 21 August 2008

H01L 21/301 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/68 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/0352 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation