System for the detection of a position for the contactless interferometric detection of a location of a target object, and scanning system equipped with the same

Details for Australian Patent Application No. 2007341691 (hide)

Owner Isis sentronics GmbH

Inventors Knuttel, Alexander

Agent Wrays

Pub. Number AU-A-2007341691

PCT Pub. Number WO2008/080490

Priority 07000003.9 02.01.07 EP

Filing date 5 December 2007

Wipo publication date 10 July 2008

International Classifications

G01B 9/02 (2006.01) Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

16 July 2009 PCT application entered the National Phase

  PCT publication WO2008/080490 Priority application(s): WO2008/080490

1 December 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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