Owner Monash University Commonwealth Scientific and Industrial Research Organisation

Inventors Zahiri, Saden Heshmatllah; Friend, James; King, Peter Christopher; Jahedi, Mahnaz Zehtab

Agent Davies Collison Cave

Pub. Number AU-A-2007335239

PCT Pub. Number WO2008/074064

Priority 2006907043 18.12.06 AU; 2007903632 04.07.07 AU

Filing date 18 December 2007

Wipo publication date 26 June 2008

H01L 21/28 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B05B 7/14 (2006.01) Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas - designed for spraying particulate materials

B05C 19/00 (2006.01) Apparatus specially adapted for applying particulate materials to surfaces

B05C 19/04 (2006.01) Apparatus specially adapted for applying particulate materials to surfaces

B05D 1/12 (2006.01) Processes for applying liquids or other fluent materials - Applying particulate materials

H01L 21/283 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 41/047 (2006.01) Piezo-electric elements in general