A semiconductor doping process

Details for Australian Patent Application No. 2007332083 (hide)

Owner WRiota Pty Ltd

Inventors Fujisawa, Naoki; Williams, James Stanislaus; Maxwell, Ian Andrew; Bradby, Jodie Elizabeth; Ruffell, Simon

Agent Davies Collison Cave

Pub. Number AU-A-2007332083

PCT Pub. Number WO2008/070925

Priority 60/874,757 13.12.06 US

Filing date 13 December 2007

Wipo publication date 19 June 2008

International Classifications

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

4 June 2009 PCT application entered the National Phase

  PCT publication WO2008/070925 Priority application(s): WO2008/070925

17 November 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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