Method and arrangement for heat treatment of substrates

Details for Australian Patent Application No. 2007321185 (hide)

Owner Centrotherm Thermal Solutions GmbH + Co. KG

Inventors Hartung, Robert Michael; Voller, Hans Ulrich

Agent Wrays

Pub. Number AU-A-2007321185

PCT Pub. Number WO2008/059049

Priority 10 2006 054 691.1 17.11.06 DE

Filing date 16 November 2007

Wipo publication date 22 May 2008

International Classifications

H01L 21/687 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 June 2009 PCT application entered the National Phase

  PCT publication WO2008/059049 Priority application(s): WO2008/059049

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