Film forming condition setting method, photoelectric converter, and manufacturing method, manufacturing apparatus and inspection method for the same

Details for Australian Patent Application No. 2007292560 (hide)

Owner Mitsubishi Heavy Industries, Ltd.

Inventors Nakano, Youji; Satake, Kouji; Goya, Saneyuki

Agent FB Rice

Pub. Number AU-A-2007292560

PCT Pub. Number WO2008/029716

Priority 2006-239608 04.09.06 JP

Filing date 30 August 2007

Wipo publication date 13 March 2008

International Classifications

H01L 31/042 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - including a panel or array of photoelectric cells, e.g. solar cells

C23C 16/24 (2006.01) Chemical deposition or plating by decomposition

Event Publications

29 January 2009 PCT application entered the National Phase

  PCT publication WO2008/029716 Priority application(s): WO2008/029716

5 February 2009 Amendment Made

  The nature of the amendment is: Amend the invention title to read Method of setting conditions for film deposition, photovoltaic device, and production process, production apparatus and test method for same

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