ECR plasma source

Details for Australian Patent Application No. 2007283313 (hide)

Owner Roth & Rau AG

Inventors Mai, Joachim; Fell, Valeri; Rau, Bernd

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2007283313

PCT Pub. Number WO2008/017304

Priority 10 2006 037 144.5 09.08.06 DE

Filing date 8 August 2007

Wipo publication date 14 February 2008

International Classifications

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

5 March 2009 PCT application entered the National Phase

  PCT publication WO2008/017304 Priority application(s): WO2008/017304

14 April 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2007283338-Electric control system of control box

2007283312-Biomarkers for inflammation of the liver