Owner Shin-Etsu Chemical Co., Ltd. ShinEtsu Handotai Co., Ltd.

Inventors Ohtsuka, Hiroyuki; Watabe, Takenori; Ueguri, Toyohiro; Ojima, Satoyuki; Ishikawa, Naoki

Agent Shelston IP

Pub. Number AU-A-2007282721

PCT Pub. Number WO2008/018265

Priority 2006-217439 09.08.06 JP

Filing date 12 July 2007

Wipo publication date 14 February 2008

H01L 31/04 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - adapted as conversion devices

H01L 21/28 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/288 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/0224 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Electrodes