Method for depositing electrically insulating layers

Details for Australian Patent Application No. 2007276186 (hide)

Owner Oerlikon Trading AG, Truebbach

Inventors Ramm, Juergen; Widrig, Beno; Wohlrab, Christian

Agent Griffith Hack

Pub. Number AU-B-2007276186

PCT Pub. Number WO2008/009619

Priority 01166/06 19.07.06 CH

Filing date 12 July 2007

Wipo publication date 24 January 2008

Acceptance publication date 1 March 2012

International Classifications

C23C 14/32 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by explosion

C23C 14/08 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

Event Publications

26 February 2009 Amendment Made

  The nature of the amendment is: Amend co-inventor name from Ramm, Jurgen to Ramm, Juergen

26 February 2009 Alteration of Name

  The name of the applicant has been altered to Oerlikon Trading AG, Truebbach

26 February 2009 PCT application entered the National Phase

  PCT publication WO2008/009619 Priority application(s): WO2008/009619

1 March 2012 Application Accepted

  Published as AU-B-2007276186

28 June 2012 Standard Patent Sealed

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