Method and device for plasma-assisted chemical vapour deposition on the inner wall of a hollow body

Details for Australian Patent Application No. 2007274256 (hide)

Owner Stein, R.

Inventors Noll, Oliver

Agent Watermark

Pub. Number AU-A-2007274256

PCT Pub. Number WO2008/006856

Priority 10 2006 032 568.0 12.07.06 DE

Filing date 11 July 2007

Wipo publication date 17 January 2008

International Classifications

C23C 16/04 (2006.01) Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

Event Publications

5 February 2009 PCT application entered the National Phase

  PCT publication WO2008/006856 Priority application(s): WO2008/006856

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