Method for microcrystalline silicon film formation and solar cell

Details for Australian Patent Application No. 2007230515 (hide)

Owner IHI Corporation

Inventors Takagi, Tomoko; Itou, Norikazu; Ueda, Masashi

Agent Spruson & Ferguson

Pub. Number AU-B-2007230515

PCT Pub. Number WO2007/111028

Priority 2006-092481 29.03.06 JP

Filing date 29 March 2007

Wipo publication date 4 October 2007

Acceptance publication date 11 November 2010

International Classifications

C23C 16/509 (2006.01) Chemical deposition or plating by decomposition

C23C 16/24 (2006.01) Chemical deposition or plating by decomposition

H01L 31/04 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - adapted as conversion devices

Event Publications

13 November 2008 PCT application entered the National Phase

  PCT publication WO2007/111028 Priority application(s): WO2007/111028

5 February 2009 Alteration of Name

  The name of the applicant has been altered to IHI Corporation

11 November 2010 Application Accepted

  Published as AU-B-2007230515

10 March 2011 Standard Patent Sealed

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