Electrode and vacuum processing apparatus

Details for Australian Patent Application No. 2007230338 (hide)

Owner Mitsubishi Heavy Industries, Ltd.

Inventors Monaka, Toshiaki; Satake, Kouji; Sakai, Satoshi; Yamakoshi, Hideo; Watanabe, Toshiya; Iyomasa, Atsuhiro

Agent Shelston IP

Pub. Number AU-B-2007230338

PCT Pub. Number WO2007/111204

Priority 2006-082690 24.03.06 JP

Filing date 20 March 2007

Wipo publication date 4 October 2007

Acceptance publication date 7 April 2011

International Classifications

C23C 16/505 (2006.01) Chemical deposition or plating by decomposition

C23C 16/455 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

H05H 1/46 (2006.01) Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

Event Publications

10 July 2008 PCT application entered the National Phase

  PCT publication WO2007/111204 Priority application(s): WO2007/111204

7 April 2011 Application Accepted

  Published as AU-B-2007230338

4 August 2011 Standard Patent Sealed

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