Megasonic processing apparatus with frequency sweeping of thickness mode transducers
Details for Australian Patent Application No. 2007227293 (hide)
International Classifications
Event Publications
9 October 2008 PCT application entered the National Phase
PCT publication WO2007/109255 Priority application(s): WO2007/109255
15 September 2011 Application Accepted
Published as AU-B-2007227293
19 January 2012 Standard Patent Sealed
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