Owner General Electric Company

Inventors Shuba, Roman; D'Evelyn, Mark Philip; Leman, John Thomas; McNulty, Thomas Francis

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2007203614

Priority 11/497,876 03.08.06 US

Filing date 2 August 2007

Wipo publication date 21 February 2008

C01B 33/02 (2006.01) Silicon

C01B 33/023 (2006.01) Silicon

C01B 33/025 (2006.01) Silicon

C01B 33/187 (2006.01) Silicon

H01L 21/02 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof