Method of manufacture for a component including at least one single-cyrstal layer on a substrate

Details for Australian Patent Application No. 2007202645 (hide)

Owner MHS Industries

Inventors Tauzinat, Pierre; Briere, Olivier; Ancilotti, Michel; Carriot, Olivier; Gadot, Gerard; Lainat, Frederic

Agent Spruson & Ferguson

Pub. Number AU-A-2007202645

Filing date 8 June 2007

Wipo publication date 8 January 2009

International Classifications

H01L 21/20 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 4/04 (2006.01) Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge - characterised by the coating material

C23C 4/12 (2006.01) Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge - characterised by the method of spraying

H01L 21/02 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

28 June 2007 Complete Application Filed

8 January 2009 Application Open to Public Inspection

  Published as AU-A-2007202645

5 April 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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