Method and apparatus for manufacturing cleaned substrates or clean substrates which are further processed

Details for Australian Patent Application No. 2006349512 (hide)

Owner Oerlikon Trading AG, Truebbach

Inventors Gstoehl, Oliver; Krassnitzer, Siegfried; Lendi, Daniel

Agent Griffith Hack

Pub. Number AU-A-2006349512

PCT Pub. Number WO2008/049463

Filing date 27 October 2006

Wipo publication date 2 May 2008

International Classifications

B08B 7/00 (2006.01) Cleaning by methods not provided for in a single other subclass or a single group in this subclass

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/306 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

23 April 2009 Alteration of Name

  The name of the applicant has been altered to Oerlikon Trading AG, Truebbach

23 April 2009 PCT application entered the National Phase

  PCT publication WO2008/049463 Priority application(s): WO2008/049463

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2006349527-Hearing aid with memory space for functional settings and learned settings, and programming method thereof

2006349498-A graphical user interface