Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon

Details for Australian Patent Application No. 2006340825 (hide)

Owner Advanced Technology Materials, Inc.

Inventors Visintin, Pamela M.; King, Mackenzie; Jiang, Ping; Korzenski, Michael B.

Agent Callinan

Pub. Number AU-A-2006340825

PCT Pub. Number WO2007/111694

Priority 60/805,826 26.06.06 US; 60/821,631 07.08.06 US; 60/735,225 09.11.05 US; 60/760,969 20.01.06 US

Filing date 9 November 2006

Wipo publication date 4 October 2007

International Classifications

H01L 21/302 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/461 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

29 May 2008 PCT application entered the National Phase

  PCT publication WO2007/111694 Priority application(s): WO2007/111694

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