Device and method for treating the surfaces of substrates

Details for Australian Patent Application No. 2006331081 (hide)

Owner Gebr. Schmid GmbH & Co.

Inventors Kappler, Heinz

Agent Griffith Hack

Pub. Number AU-B-2006331081

PCT Pub. Number WO2007/073887

Priority 102005062527.4 16.12.05 DE

Filing date 15 December 2006

Wipo publication date 5 July 2007

Acceptance publication date 1 September 2011

International Classifications

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B05C 1/08 (2006.01) Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating - using a roller

Event Publications

26 June 2008 PCT application entered the National Phase

  PCT publication WO2007/073887 Priority application(s): WO2007/073887

1 September 2011 Application Accepted

  Published as AU-B-2006331081

12 January 2012 Standard Patent Sealed

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