Process for manufacturing micromechanical devices containing a getter material and devices so manufactured

Details for Australian Patent Application No. 2006322862 (hide)

International Classifications

Event Publications

26 June 2008 PCT application entered the National Phase

PCT publication WO2007/066370 Priority application(s): WO2007/066370

28 April 2011 Application Accepted

Published as AU-B-2006322862 (Modified Examination)

11 August 2011 Application for Amendment

The nature of the amendment is as shown in the statement(s) filed 22 Jul 2011. Address for service in Australia - Davies Collison Cave 1 Nicholson Street Melbourne VIC 3000

1 December 2011 Amendment Made

The nature of the amendment is as shown in the statement(s) filed 22 Jul 2011 2007

8 December 2011 Standard Patent Sealed

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