Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material

Details for Australian Patent Application No. 2006304356 (hide)

Owner Saint-Gobain Ceramics & Plastics, Inc.

Inventors Wang, Jun; Haerle, Andrew G.

Agent EF WELLINGTON & CO

Pub. Number AU-B-2006304356

PCT Pub. Number WO2007/047547

Priority 11/251,633 14.10.05 US

Filing date 13 October 2006

Wipo publication date 26 April 2007

Acceptance publication date 1 July 2010

International Classifications

C01F 7/02 (2006.01) Compounds of aluminium

C09G 1/02 (2006.01) Polishing compositions

C09K 3/14 (2006.01) Materials not provided for elsewhere - Anti-slip materials

H01L 21/306 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 May 2008 PCT application entered the National Phase

  PCT publication WO2007/047547 Priority application(s): WO2007/047547

1 July 2010 Application Accepted

  Published as AU-B-2006304356

28 October 2010 Standard Patent Sealed

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