Polishing slurries and methods for utilizing same

Details for Australian Patent Application No. 2006297240 (hide)

Owner Saint-Gobain Ceramics & Plastics, Inc.

Inventors Laconto, Ronald W.; Haerle, Andrew G.

Agent EF WELLINGTON & CO

Pub. Number AU-B-2006297240

PCT Pub. Number WO2007/041199

Priority 60/755,554 30.12.05 US; 60/722,270 30.09.05 US

Filing date 29 September 2006

Wipo publication date 12 April 2007

Acceptance publication date 9 April 2009

International Classifications

C09G 1/02 (2006.01) Polishing compositions

H01L 21/321 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 April 2008 PCT application entered the National Phase

  PCT publication WO2007/041199 Priority application(s): WO2007/041199

9 April 2009 Application Accepted

  Published as AU-B-2006297240

6 August 2009 Standard Patent Sealed

26 April 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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