System, apparatus, and method for increasing particle density and energy by creating a controlled plasma environment into a gaseous media

Details for Australian Patent Application No. 2006295155 (hide)

Owner Robert Chrysler Brennan, Trustee for SDI Technology Trust

Inventors Brennan, Robert Chrysler; Higman, Kumiko Iso; Penny, L. Stuart

Agent Watermark

Pub. Number AU-A-2006295155

PCT Pub. Number WO2007/037980

Priority 11/236,290 27.09.05 US

Filing date 12 September 2006

Wipo publication date 5 April 2007

International Classifications

H01L 21/306 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 April 2008 PCT application entered the National Phase

  PCT publication WO2007/037980 Priority application(s): WO2007/037980

15 April 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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