Device for picking up and holding a plurality of substrates and an electroplating device
Details for Australian Patent Application No. 2006278145 (hide)
International Classifications
Event Publications
28 February 2008 PCT application entered the National Phase
PCT publication WO2007/017279 Priority application(s): WO2007/017279
18 November 2010 Application Accepted
Published as AU-B-2006278145
17 March 2011 Standard Patent Sealed
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