Oscillatory wave detecting apparatus

Details for Australian Patent Application No. 2006266731 (hide)

Owner Tokyo Electron Limited

Inventors Ikeuchi, Naoki

Agent Pizzeys

Pub. Number AU-A-2006266731

PCT Pub. Number WO2007/004665

Priority 2005-197798 06.07.05 JP

Filing date 5 July 2006

Wipo publication date 11 January 2007

International Classifications

G01H 11/08 (2006.01) Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties

G01H 13/00 (2006.01) Measuring resonant frequency

H04R 17/10 (2006.01) Piezo-electric transducers - Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency

Event Publications

31 January 2008 PCT application entered the National Phase

  PCT publication WO2007/004665 Priority application(s): WO2007/004665

14 April 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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